AFM for Wide-Bandgap & III-V Semiconductors

GaN, SiC, Ga₂O₃, GaAs, InP and related devices are defined by doping, junctions and interfaces at the nanometre scale. ResiScope™ III maps resistance over ten decades in one scan, the measurement usually done by spreading resistance (SSRM) or conductive AFM, and HD-KFM™ III maps the surface potential across junctions and device layers.

What to measure

Measurements and the Nano-Observer mode for each

Dopant & carrier contrast, resistance profiles (SSRM, C-AFM)ResiScope™ III Surface potential across junctions (KPFM)HD-KFM™ III Capacitance & dielectric contrast (sMIM)sMIM

Materials

Materials in this family

MaterialWhat to measureNano-Observer modes
GaNCurrent & resistance (C-AFM, SSRM) · Surface potential, work function (KPFM)ResiScope™ III HD-KFM™ III
SiCSurface potential, work function (KPFM) · Current & resistance (C-AFM, SSRM)HD-KFM™ III ResiScope™ III
DiamonddiamondCurrent & resistance (C-AFM, SSRM) · Surface potential, work function (KPFM)ResiScope™ III HD-KFM™ III
GaAs / AlGaAsGaAs · AlGaAsSurface potential, work function (KPFM) · Current & resistance (C-AFM, SSRM)HD-KFM™ III ResiScope™ III
AlGaN / GaN HEMTsHEMT · AlGaN · GaN HEMTsCurrent & resistance (C-AFM, SSRM) · Surface potential, work function (KPFM)ResiScope™ III HD-KFM™ III
AlNCurrent & resistance (C-AFM, SSRM) · Surface potential, work function (KPFM)ResiScope™ III HD-KFM™ III
Ga₂O₃Ga2O3Surface potential, work function (KPFM) · Current & resistance (C-AFM, SSRM)HD-KFM™ III ResiScope™ III
InAs / InGaAs / GaSbInAs · GaSb · InGaAsSurface potential, work function (KPFM) · Current & resistance (C-AFM, SSRM)HD-KFM™ III ResiScope™ III
InPSurface potential, work function (KPFM) · Current & resistance (C-AFM, SSRM)HD-KFM™ III ResiScope™ III
InGaNSurface potential, work function (KPFM) · Current & resistance (C-AFM, SSRM)HD-KFM™ III ResiScope™ III